# this file is part of refractiveindex.info database
# refractiveindex.info database is in the public domain
# copyright and related rights waived via CC0 1.0

REFERENCES: |
    D. Franta, D. Nečas, I. Ohlídal, A. Giglia.
    Dispersion model for optical thin films applicable in wide spectral range.
    <a href="https://doi.org/10.1117/12.2190104"><i>Proc. SPIE</i> <b>9628</b>, 96281U (2015)</a>
    (Numerical data kindly provided by Daniel Franta)
COMMENTS: |
    Film Al<sub>2</sub>O<sub>3</sub>;
    Deposited by e-beam evaporation on c-Si; 121.5 nm thick film with an amorphous (very fine polycrystalline) structure;
    Heterogenous data processing combining ellipsometric and spectrophotometric measurements;
    Room temperature.
CONDITIONS:
    film_thickness: 121.5e-9
    substrate: c-Si
DATA:
  - type: tabulated nk
    data: |
        0.114114 1.71641396175 0.830322020891
        0.115436 1.74212503575 0.820401717377
        0.116772 1.76726883938 0.809259258029
        0.118124 1.79178460492 0.796938431612
        0.119492 1.81561425741 0.783484961669
        0.120876 1.8387024606 0.768946505218
        0.122276 1.860996674 0.75337261856
        0.123692 1.8824472136 0.736814695028
        0.125124 1.90300731054 0.719325879451
        0.126573 1.92263316315 0.70096096402
        0.128038 1.94128397903 0.68177627021
        0.129521 1.95892200453 0.661829521331
        0.131021 1.97551254049 0.641179710175
        0.132538 1.99102394315 0.619886966075
        0.134073 2.00542761056 0.59801242552
        0.135625 2.01869795517 0.575618110251
        0.137196 2.03081236391 0.552766816519
        0.138784 2.04175114764 0.529522018932
        0.140391 2.05149748263 0.505947792048
        0.142017 2.06003734671 0.482108752591
        0.143661 2.06735945368 0.458070024952
        0.145325 2.07345518974 0.433897232363
        0.147008 2.07831855638 0.409656515969
        0.14871 2.0819461244 0.385414583864
        0.150432 2.08433700487 0.361238792025
        0.152174 2.08549284308 0.33719725907
        0.153936 2.08541784277 0.313359016716
        0.155718 2.08411882936 0.289794197889
        0.157522 2.0816053621 0.266574264538
        0.159346 2.07788990771 0.243772277304
        0.161191 2.07298809081 0.221463209367
        0.163057 2.06691904054 0.19972430688
        0.164945 2.05970585819 0.178635498445
        0.166855 2.05137623855 0.158279855961
        0.168787 2.04196328824 0.13874410874
        0.170742 2.03150660034 0.120119211894
        0.172719 2.02005366785 0.102500968288
        0.174719 2.00766175454 0.0859907004108
        0.176742 1.99440039974 0.0706959635775
        0.178789 1.9803548318 0.0567312838535
        0.180859 1.96563074312 0.0442188910223
        0.182953 1.95036123254 0.0332893957207
        0.185072 1.93471750243 0.0240823245379
        0.187215 1.91892692012 0.0167463648823
        0.189383 1.90330866808 0.0114390484951
        0.191575 1.88837089746 0.00832526789149
        0.193794 1.87529027928 0.00717758246872
        0.196038 1.86408979916 0.00634617398311
        0.198308 1.8540109281 0.00561744826756
        0.200604 1.84478822804 0.00497860014353
        0.202927 1.83626784108 0.00441813714626
        0.205277 1.82834494724 0.0039259672402
        0.207654 1.82094198523 0.00349329524526
        0.210058 1.81399853725 0.00311248116111
        0.212491 1.80746585349 0.00277689779269
        0.214951 1.80130357949 0.00248079914756
        0.21744 1.79547765679 0.00221920287479
        0.219958 1.78995890241 0.00198778699414
        0.222505 1.78472200607 0.00178280000176
        0.225082 1.77974479787 0.00160098302863
        0.227688 1.77500769806 0.00143950264248
        0.230324 1.77049329364 0.00129589294046
        0.232991 1.76618600596 0.00116800569519
        0.235689 1.76207182525 0.0010539674511
        0.238418 1.75813809524 0.000952142602736
        0.241179 1.75437333637 0.000861101613176
        0.243972 1.75076709874 0.000779593644605
        0.246797 1.74730983889 0.000706522974763
        0.249655 1.74399281529 0.000640928661335
        0.252546 1.74080799934 0.000581966993282
        0.25547 1.73774799875 0.000528896334345
        0.258428 1.73480599146 0.000481064020923
        0.261421 1.73197566801 0.000437895025256
        0.264448 1.72925118136 0.000398882136613
        0.26751 1.72662710271 0.000363577448808
        0.270608 1.72409838264 0.000331584972807
        0.273741 1.72166031669 0.00030255421919
        0.276911 1.71930851479 0.000276174617368
        0.280117 1.71703887405 0.000252170657433
        0.283361 1.71484755444 0.000230297656639
        0.286642 1.712730957 0.000210338066339
        0.289961 1.71068570425 0.000192098247011
        0.293319 1.70870862257 0.00017540564908
        0.296715 1.70679672628 0.0001601063459
        0.300151 1.70494720322 0.000146062872643
        0.303627 1.70315740171 0.000133152331193
        0.307142 1.70142481869 0.000121264726567
        0.310699 1.6997470889 0.00011030150508
        0.314297 1.69812197502 0.000100174268456
        0.317936 1.69654735868 9.08036415495e-05
        0.321618 1.69502123222 8.21182743144e-05
        0.325342 1.69354169107 7.40539612115e-05
        0.329109 1.69210692681 6.65528634529e-05
        0.33292 1.69071522072 5.95628213861e-05
        0.336775 1.68936493781 5.30367459671e-05
        0.340675 1.68805452127 4.69320796938e-05
        0.34462 1.68678248723 4.12103186029e-05
        0.34861 1.68554741983 3.58365879986e-05
        0.352647 1.6843479664 3.07792655105e-05
        0.35673 1.68318283265 2.60096458753e-05
        0.360861 1.68205077764 2.15016425402e-05
        0.36504 1.68095060788 1.72315217854e-05
        0.369266 1.67988116941 1.31776655932e-05
        0.373542 1.67884133448 9.32035994093e-06
        0.377868 1.67782997092 5.64160557257e-06
        0.382243 1.67684582596 2.12494853811e-06
        0.386669 1.6758868487 0
        0.391147 1.67495556877 0
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        0.400258 1.67316994286 0
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        0.409581 1.6714798158 0
        0.414324 1.67066845827 0
        0.419121 1.66987856361 0
        0.423975 1.66910942439 0
        0.428884 1.66836036539 0
        0.43385 1.66763074035 0
        0.438874 1.66691992947 0
        0.443956 1.66622733748 0
        0.449097 1.66555239204 0
        0.454297 1.66489454234 0
        0.459558 1.66425325787 0
        0.464879 1.6636280273 0
        0.470262 1.66301835754 0
        0.475707 1.66242377277 0
        0.481216 1.66184381363 0
        0.486788 1.66127803642 0
        0.492425 1.66072601239 0
        0.498127 1.66018732702 0
        0.503895 1.65966157944 0
        0.50973 1.65914838177 0
        0.515632 1.65864735857 0
        0.521603 1.65815814632 0
        0.527643 1.65768039289 0
        0.533752 1.65721375709 0
        0.539933 1.65675790817 0
        0.546185 1.65631252542 0
        0.55251 1.65587729777 0
        0.558907 1.65545192335 0
        0.565379 1.65503610916 0
        0.571926 1.65462957072 0
        0.578549 1.6542320317 0
        0.585248 1.65384322362 0
        0.592025 1.65346288551 0
        0.59888 1.65309076369 0
        0.605815 1.65272661139 0
        0.61283 1.65237018855 0
        0.619926 1.65202126156 0
        0.627104 1.65167960296 0
        0.634366 1.65134499126 0
        0.641712 1.65101721068 0
        0.649142 1.65069605095 0
        0.656659 1.65038130709 0
        0.664263 1.65007277919 0
        0.671955 1.64977027228 0
        0.679735 1.64947359606 0
        0.687606 1.64918256479 0
        0.695568 1.64889699706 0
        0.703623 1.64861671567 0
        0.71177 1.64834154746 0
        0.720012 1.64807132313 0
        0.72835 1.64780587709 0
        0.736783 1.64754504739 0
        0.745315 1.64728867545 0
        0.753945 1.64703660606 0
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        0.798619 1.64583557915 0
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        0.817222 1.64538018719 0
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        1.05279 1.64099208463 0
        1.06498 1.6408087428 0
        1.07731 1.64062594672 0
        1.08978 1.64044359384 0
        1.1024 1.64026158201 0
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        1.12808 1.63989817398 0
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        1.15436 1.63953490955 0
        1.16772 1.63935307748 0
        1.18124 1.6391709769 0
        1.19492 1.63898850616 0
        1.20876 1.63880556346 0
        1.22276 1.63862204681 0
        1.23692 1.63843785385 0
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        1.26573 1.63806702762 0
        1.28038 1.63788018753 0
        1.29521 1.63769225737 0
        1.31021 1.63750313214 0
        1.32538 1.63731270642 0
        1.34073 1.63712087373 0
        1.35625 1.63692752687 0
        1.37196 1.63673255774 0
        1.38784 1.63653585719 0
        1.40391 1.6363373152 0
        1.42017 1.63613682033 0
        1.43661 1.63593426011 0
        1.45325 1.63572952094 0
        1.47008 1.63552248753 0
        1.4871 1.63531304343 0
        1.50432 1.63510107073 0
        1.52174 1.63488644962 0
        1.53936 1.63466905894 0
        1.55718 1.63444877581 5.0434142077e-317
        1.57522 1.63422547537 4.76557352343e-309
        1.59346 1.63399903072 2.8987118624e-301
        1.61191 1.63376931331 1.14672070746e-293
        1.63057 1.63353619237 2.98013866473e-286
        1.64945 1.63329953486 5.13812170237e-279
        1.66855 1.63305920567 5.93370570969e-272
        1.68787 1.63281506706 4.63308099369e-265
        1.70742 1.632566979 2.46837303889e-258
        1.72719 1.63231479919 9.05381810335e-252
        1.74719 1.63205838203 2.30635566245e-245
        1.76742 1.63179757972 4.11528850784e-239
        1.78789 1.63153224153 5.18649793754e-233
        1.80859 1.63126221335 4.65462725688e-227
        1.82953 1.63098733855 2.99838639045e-221
        1.85072 1.63070745684 1.39719723326e-215
        1.87215 1.63042240476 4.74561778793e-210
        1.89383 1.6301320156 1.18362478543e-204
        1.91575 1.62983611896 2.18357702767e-199
        1.93794 1.62953454073 3.00075381248e-194
        1.96038 1.62922710251 3.09316275998e-189
        1.98308 1.62891362302 2.40779493992e-184
        2.00604 1.62859391588 1.42477564955e-179
        2.02927 1.62826779085 6.45035198744e-175
        2.05277 1.62793505324 2.24835677096e-170
        2.07654 1.62759550392 6.0710471139e-166
        2.10058 1.62724893896 1.27758093018e-161
        2.12491 1.62689514952 2.10760474866e-157
        2.14951 1.62653392139 2.74129853928e-153
        2.1744 1.62616503579 2.82698015951e-149
        2.19958 1.62578826775 2.32415433272e-145
        2.22505 1.62540338758 1.53145567037e-141
        2.25082 1.6250101591 8.13034323164e-138
        2.27688 1.62460834023 3.49537278434e-134
        2.30324 1.62419768287 1.22298787507e-130
        2.32991 1.62377793271 3.49952053439e-127
        2.35689 1.62334882785 8.2284380272e-124
        2.38418 1.62291010003 1.59722304643e-120
        2.41179 1.62246147378 2.57112457712e-117
        2.43972 1.62200266761 3.44758068542e-114
        2.46797 1.62153338921 3.86740150724e-111
        2.49655 1.62105334162 3.64480002498e-108
        2.52546 1.62056221785 2.89781908476e-105
        2.5547 1.62005970204 1.95147869146e-102
        2.58428 1.61954547107 1.11753857535e-99
        2.61421 1.61901919163 5.46309603466e-97
        2.64448 1.61848052045 2.288365315e-94
        2.6751 1.61792910596 8.24359708935e-92
        2.70608 1.61736458466 2.56313005002e-89
        2.73741 1.61678658416 6.90253161228e-87
        2.76911 1.61619471932 1.61553383219e-84
        2.80117 1.6155885952 3.29719817208e-82
        2.83361 1.6149678042 5.88725792996e-80
        2.86642 1.61433192562 9.22581590693e-78
        2.89961 1.61368052773 1.27283664129e-75
        2.93319 1.6130131666 1.55073533114e-73
        2.96715 1.61232937927 1.67336246896e-71
        3.00151 1.61162869531 1.60394635611e-69
        3.03627 1.61091062285 1.36951851398e-67
        3.07142 1.61017466195 1.04454299481e-65
        3.10699 1.60942028837 7.13574210742e-64
        3.14297 1.60864696818 4.37777127705e-62
        3.17936 1.6078541454 2.41817664619e-60
        3.21618 1.60704124875 1.20569598508e-58
        3.25342 1.60620768742 5.4396470018e-57
        3.29109 1.60535284996 2.22602513858e-55
        3.3292 1.60447610407 8.28199230703e-54
        3.36775 1.60357680084 2.80789042017e-52
        3.40675 1.60265426192 8.69436707986e-51
        3.4462 1.60170779084 2.46409510672e-49
        3.4861 1.60073666507 6.40568585993e-48
        3.52647 1.59974013808 1.53062147628e-46
        3.5673 1.59871743306 3.36858961093e-45
        3.60861 1.59766775367 6.84179396923e-44
        3.6504 1.59659026671 1.28492181463e-42
        3.69266 1.59548410941 2.23558779657e-41
        3.73542 1.59434839316 3.61010039764e-40
        3.77868 1.59318219399 5.42056696833e-39
        3.82243 1.59198454764 7.58114829584e-38
        3.86669 1.59075446247 9.89325240551e-37
        3.91147 1.58949090173 1.20666973654e-35
        3.95676 1.58819279699 1.37783509167e-34
        4.00258 1.58685902745 1.47524126052e-33
        4.04893 1.58548843554 1.48342971341e-32
        4.09581 1.58407981045 1.40305322976e-31
        4.14324 1.58263190972 1.25006928459e-30
        4.19121 1.5811434149 1.05070559212e-29
        4.23975 1.57961297677 8.34323308797e-29
        4.28884 1.57803917185 6.26756550807e-28
        4.3385 1.57642053445 4.46031091777e-27
        4.38874 1.57475551936 3.01099353005e-26
        4.43956 1.57304252441 1.93061675909e-25
        4.49097 1.57127987234 1.17726371221e-24
        4.54297 1.56946581202 6.83564995298e-24
        4.59558 1.56759852328 3.78389030526e-23
        4.64879 1.56567609691 1.99922594356e-22
        4.70262 1.56369652095 1.00936848318e-21
        4.75707 1.56165770694 4.8751753998e-21
        4.81216 1.55955748183 2.25506995095e-20
        4.86788 1.55739352997 1.00005633106e-19
        4.92425 1.55516344781 4.25635670985e-19
        4.98127 1.55286471974 1.74038129426e-18
        5.03895 1.55049467022 6.8434786105e-18
        5.0973 1.54805052958 2.59035092373e-17
        5.15632 1.54552935016 9.44718852237e-17
        5.21603 1.54292805698 3.3228613483e-16
        5.27643 1.54024337937 1.12818779743e-15
        5.33752 1.53747190219 3.70079232936e-15
        5.39933 1.53461000718 1.17389086825e-14
        5.46185 1.53165384486 3.60368773812e-14
        5.5251 1.52859938581 1.07154667782e-13
        5.58907 1.52544235586 3.08865383342e-13
        5.65379 1.52217818144 8.63700301379e-13
        5.71926 1.5188021032 2.34490934442e-12
        5.78549 1.51530896523 6.18562907736e-12
        5.85248 1.511693348 1.5865529375e-11
        5.92025 1.50794948924 3.95957668114e-11
        5.9888 1.50407115073 9.62209976398e-11
        6.05815 1.50005179066 2.27831718824e-10
        6.1283 1.49588434369 5.25982420619e-10
        6.19926 1.49156123719 1.18474197946e-09
        6.27104 1.48707438192 2.60524221656e-09
        6.34366 1.48241506114 5.59646991923e-09
        6.41712 1.47757388436 1.17512964879e-08
        6.49142 1.47254066332 2.41335265354e-08
        6.56659 1.46730449495 4.85032917925e-08
        6.64263 1.46185337536 9.54516698031e-08
        6.71955 1.45617439446 1.84034286778e-07
        6.79735 1.45025338161 3.4781847632e-07
        6.87606 1.4440747828 6.44727246658e-07
        6.95568 1.43762154452 1.17272129284e-06
        7.03623 1.43087485306 2.09425876428e-06
        7.1177 1.42381378157 3.67366550258e-06
        7.20012 1.41641511617 6.33308781271e-06
        7.2835 1.40865269532 1.07346374401e-05
        7.36783 1.40049722274 1.78987249627e-05
        7.45315 1.39191548392 2.93716243143e-05
        7.53945 1.38286958965 4.74599559156e-05
        7.62676 1.37331595991 7.55602307895e-05
        7.71507 1.36320426298 0.000118642829507
        7.80441 1.35247521907 0.00018404451058
        7.89478 1.34105805234 0.000282972521758
        7.98619 1.32886659942 0.000433649603315
        8.07867 1.3157949846 0.000667834694529
        8.17222 1.30171411035 0.00104305600956
        8.26685 1.2864752219 0.00166194097389
        8.36257 1.26992774048 0.00269564095482
        8.45941 1.25195957487 0.00439997271691
        8.55736 1.23255640217 0.00710418439921
        8.65645 1.21186117773 0.0111519474367
        8.75669 1.19019177307 0.0167916402301
        8.85809 1.16797602871 0.0240483427203
        8.96066 1.14558828936 0.0326458502522
        9.06442 1.12313645275 0.042051676981
        9.16938 1.10029701808 0.0516691154106
        9.27555 1.07629827826 0.0611161366637
        9.38296 1.05007599602 0.0704726294355
        9.49161 1.0205396974 0.0803950384004
        9.60152 0.986837028484 0.0920773690829
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